F00500 - SEMI F5 - Guide for Gaseous Effluent Handling StdPbc-0710 • Support equipment interconnects

• Support equipment interconnects

Safety Supervisors’ Communication Council (SSCC)

SEMI F61-0617 (complete rewrite)

orgで入手可能となる。初版は1990年発行。前版は2004年11月発行。

such as epitaxial layers

F00500 - SEMI F5 - Guide for Gaseous Effluent Handling StdPbc-0710 • Support equipment interconnectsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This document, as balloted, is intended to replace SEMI F5 90 in its entirety. NOTICE: Paragraphs entitled "NOTE" are not an official part of this guide and are not intended to modify or supersede the official